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維修流程 Repair
Flow / 品質系統 Quality system / 維修環境 Environment
Robot Arm System Repair
& Overhaul
Repair
Contents :
1.
Parts clean
2.
Replace all bearing
3.
Parts inspection and replace damage parts
4.
Leveling check and adjustment
5.
Function test and cycle test
Slit Valve ( Chamber , Load-lock ) Repair
& Overhaul
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Compact Slit
Valve
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LAM Slit
Valve
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LAM Act-Slit
Valve
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SMC Bellow
Cylinder
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VAT S075 Slit Valve (CX0340)
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V-TEX Slit Valve
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V-TEX Slit
Valve
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V-TEX Slit
Valve
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AMAT 300mm Slit Valve ( L/L )
PN :
0040-50505
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AMAT 300mm Slit Valve ( CH )
PN :
0010-35105
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AMAT Producer-II 200mm Slit Valve
0400-75862
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AMAT ENDURA 300mm Slit Valve
0010-34370, 0010-03051, 0010-06002, 0010-14018
0010-13368,
0010-13369, 0010-13970,
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AMAT ENDURA 200mm Slit Valve
0010-76482, 0020-20345, 0010-75172, 0010-15287, 0010-76428
0010-01360,
0010-01365, 0010-20021, 0010-26966
0010-70411,
0010-75035, 0010-76392
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V-TEX Slit
Valve
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SMC 300mm L-motion Valve
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SMC 200mm
L-motion Valve
Chamber
02-121427-00
60-149991-00
Loadlock 02-133793-00
60-133798-00
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VAT S012 Slit
Valve
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VAT S07512
Slit Valve
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AMAT P5000 Chamber Slit Valve
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AMAT P5000 VAT 0340X-MH24
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V-TEX Slit Valve ( TFT / LCD )
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VAT 0300X
Slit Valve
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VAT S02 Slit
Valve
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V-TEX ATM (
YAC Etcher )
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VTEX
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VTEX
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VTEX 640x100
Load-lock Valve (LCD)
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VTEX 640x55 Chamber Valve (LCD)
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